Module: Plasma Applications

Latest Module Specifications

Current Academic Year 2025 - 2026

Module Title	Plasma Applications
Module Code	PHY1070 (ITS: PS510A)
Faculty	Physical Sciences	School	Science & Health
NFQ level	9	Credit Rating	7.5

Description

The purpose of this module is to provide an overview of the importance of plasma technology in the modern world and to give the students an awareness and appreciation of the ways in which applications of plasmas can enable the development of new manufacturing technologies and processes. The module deals in detail with the specific plasma surface interactions which determine the performance of processing technologies and examines the most important surface processing applications used in high technology industries, through a detailed treatment of specific examples.

Learning Outcomes

1. Demonstrate the ability to recognise and explain the economic and environmental importance of modern application.
2. Demonstrate the ability to identify the technical aspects of plasma surface interactions and their impact on product quality.
3. Demonstrate the ability to recognise and critically evaluate the most important examples of plasma applications.
4. Demonstrate the ability to access and critically evaluate scientific literature dealing with plasma applications.
5. Demonstrate the ability to communicate the concepts, methods and ideas studied in this module with their peers via online discussion groups.

*Type*	*Hours*	*Description*
Workload	Full time hours per semester
Assessment Feedback	75	Study of online course material
Directed learning	24	Participation in online discussion groups
Assignment Completion	30	Study for, and completion of, 5 loop quizes
Independent Study	58.5	Study for final examination
Total Workload: 187.5

Section Breakdown
CRN	20904	Part of Term	Semester 2
Coursework	0%	Examination Weight	0%
Grade Scale	40PASS	Pass Both Elements	Y
Resit Category	RC1	Best Mark	N
Module Co-ordinator	Paul Swift	Module Teacher

Type	Description	% of total	Assessment Date
Assessment Breakdown
Loop Quiz	5 Quizzes	15%	n/a
Participation	On-line participation	10%	n/a
Formal Examination	2 hour formal examination	75%	End-of-Semester

Reassessment Requirement Type
Resit arrangements are explained by the following categories; RC1: A resit is available for both^* components of the module. RC2: No resit is available for a 100% coursework module. RC3: No resit is available for the coursework component where there is a coursework and summative examination element. ^* ‘Both’ is used in the context of the module having a coursework/summative examination split; where the module is 100% coursework, there will also be a resit of the assessment

Pre-requisite	None
Co-requisite	None
Compatibles	None
Incompatibles	None

All module information is indicative and subject to change. For further information,students are advised to refer to the University's Marks and Standards and Programme Specific Regulations at: http://www.dcu.ie/registry/examinations/index.shtml

Indicative Content and Learning Activities

Indicative Syllabus
Basic processes, reactions, simple kinetic models. Plasma Surface Interactions: Surface states and structure. Ion, electron and photon surface interactions. Surface chemical kinetics. Surface Processing: Activation (surface energy, wetability and adhesion). Sputtering (sputter etching, sputter deposition and reactive sputter deposition). Etching (including RIE and high density plasma etching), etching characteristics (anisotropy, residues, selectivity, uniformity, damage). Deposition of thin films, PECVD. Film properties and structure (hardness and other physical properties, amorphous films, plasma polymerisation, epitaxial growth, interface issues). Specific Examples: Detailed examples of plasma processes including the plasma surface interaction mechanisms. Examples may include fluorocarbon etching of silicon and SiO2, CH4+H2 diamond deposition, activation of polymers and plasma processing of natural and artificial fibers, deposition of bio-compatible thin films, deposition of metallic coatings and alloys, and/or others.

Indicative Reading List

Books:

M. A. Lieberman and A. J. Lichtenberg: 2005, Principles of Plasma Discharges and Materials Processing, 2, John Wiley & Sons, 9780471720010

Articles:
None

Other Resources

None