Registry
Module Specifications
Archived Version 2020 - 2021
| Module Title |
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| Module Code |
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School |
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Online Module Resources
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|
NFQ level |
9 |
Credit Rating |
5
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|
Pre-requisite |
None
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Co-requisite |
None
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| Compatibles |
None
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| Incompatibles |
None
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Description
Advanced Plasma an Vacuum Physics
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Learning Outcomes
1. Understand the broad range of physical phenomena which determine the behaviour of plasmas
2. Working knowledge of vacuum engineering relating to industrial plasmas
3. Advanced knowledge of rf plasma used in industry
4. Knowledge of plasma relating to student's research
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|
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| Workload |
Full-time hours per semester |
| Type |
Hours |
Description |
| Lecture | 24 | Two lectures per week | | Tutorial | 12 | One tutorial per week | | Independent Study | 65 | assignment completion | | Total Workload: 101 |
All module information is indicative and subject to change. For further information,students are advised to refer to the University's Marks and Standards and Programme Specific Regulations at: http://www.dcu.ie/registry/examinations/index.shtml
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Indicative Content and
Learning Activities
PlasmasIndustrial process: rf, etch, advanced theoryVacuumPumps, Gauges, Maintenance
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| Assessment Breakdown | | Continuous Assessment | % | Examination Weight | % |
| Course Work Breakdown |
| Type | Description | % of total | Assessment Date |
|---|
| Reassessment Requirement |
Resit arrangements are explained by the following categories;
1 = A resit is available for all components of the module
2 = No resit is available for 100% continuous assessment module
3 = No resit is available for the continuous assessment component |
| Unavailable |
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Indicative Reading List
- Michael A. Lieberman, Allan J. Lichtenberg: 2005, Principles of plasma discharges and materials processing, Wiley-Interscience, Hoboken, N.J., 0-471-72001-1
- Pascal Chabert, Nicholas Braithwaite: 0, Physics of Radio-Frequency Plasmas, Cambridge University Press, 9780521763004
- John F. O'Hanlon: 2003, A user's guide to vacuum technology, Wiley-Interscience, Hoboken, NJ, 978471270522
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Other Resources
None
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Programme or List of Programmes
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| Archives: | |
